The best probe station, made in China!
PRODUCTS
F1 Probe Station
· The probe station can be configured by selecting F1+futureC+instrument.
· Please call Eoulu service hotline 4008808776 for professional engineer support!
Category:
Probe Station
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CONTACT NOW- Product Features
- Product Mix
- Product Parameters
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The world's first evolvable and able-to-learn probe station
Eoulu owns 100% of intellectual property rights
Eoulu's patented design for new digital 3.0 system
makes the probe station simpler and lighter
The world’s smallest 12-inch probe station, only 1 meter wide
Save the cost of clean room and make it easy to move
A dynamic map and static map system with Eoulu's copyright and patent
makes the probe station faster and more accurate
Eoulu’s patented “Near-Zero Error (C0)” and “Virtual Ruler (VR)” technologies
specially used for uneven wafers
The F1 architecture completely solves the problem of inaccurate probing
It is a model that all peers will surely follow.
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F1 Mechanical Performance
No. Item Chuck X-axis Y-axis Z-axis Theta axis 1 Travel 301 mm 301 mm ≥ 10 mm 10° 2 Maximum positioning accuracy * ≤ 0.05 µm ≤ 0.05 µm ≤ 1µm ± 0.003° 3 Speed ** ≥ 50 mm/s ≥ 50 mm/s ≥ 20 mm/s / 4 Maximum speed 150 mm/s 150 mm/s 35 mm/s / 5 Wafer uneveness adaptability * 100 µm 6 Average time of mapping *** Minimum value Typical value Maximum value < 500 ms <1s <3 s **** 7 XY position locking ***** Minimum value Typical value Maximum value 0.02 µm 0.038 µm 1.5µm 8 *****
Z position locking ******Minimum value Typical value Maximum value 0.65 µm 3.5 µm 15 µm * When C0 and VR are enabled
** The speed at which F1 chuck moves varies depending on the chuck size chosen by the customer, the chuck construction (Coax or Triax), and whether the chuck supports high and low temperatures
*** This time only refers to the mechanical movement time and does not include alignment time. There will be some variation depending on the size of the DUT, movement precision, and stability requirements
*** High speed and high stability cannot be achieved simultaneously. Eoulu can provide services to optimize test accuracy or test speed according to the customer'swafer and measurement application. For more information, please contact sales for hardware and software upgrade solutions
**** In the case of 8-inch, room temperature, and triax chuck, F1 adopts the highest accuracy and most stable speed mode, 1000 μm * 1000 μm chip movement time
***** It varies according to the configuration and the customer's requirements for accuracy and speed. The minimum value of XY position locking can be achieved by selecting CCD, which cannot be achieved by standard CCD.
****** The standard deviation of the probe scrub mark length σ is ≤ 5μm. We can refer to the futureD product data of Eoulu to measure more than 2,000 DUTs of 8-inch wafers. Under the high-precision wafer running mode, the probe scrub mark length difference from DUT to DUT is guaranteed to be within 3σ
****** The standard deviation of the starting position of the probe mark σ is ≤ 8μm. We can refer to the futureD product data of Eoulu to measure 2000 DUTs of 8-inch wafer. Under the high-precision and low-speed wafer running mode, the difference in starting position from DUT to DUT is guaranteed to be within 3σ
****** The above data indicators are not lower than the level of peers,refer to the article published by the peer on August 22, 2022
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