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F1 - SiPh Probe Station
· 6 inches, 8 inches and 12 inches, manual, semi-automatic and fully automatic are all model F1
· The probe station can be configured by selecting F1+futureC+instrument.
· Please call Eoulu service hotline 4008808776 for professional engineer support!
· The probe station can be configured by selecting F1+futureC+instrument.
· Please call Eoulu service hotline 4008808776 for professional engineer support!
Category:
Probe Station
Contact Information
CONTACT NOW- Product Features
- Product Mix
- Product Parameters
- Instructions
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Possess powerful silicon photonics automation
Support O-O, O-E, E-O and E-E test applications
Provide advanced test technology from single fiber to fiber array
Solve the challenges from vertical coupling to edge coupling
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F1 Mechanical Performance
No. Item Chuck X-axis Y-axis Z-axis Theta axis 1 Travel 301 mm 301 mm ≥10 mm 10° 2 Maximum positioning accuracy * ≤ 0.05 µm ≤ 0.05 µm ≤ 1 µm ± 0.003° 3 Speed ** ≥ 50 mm/s ≥ 50 mm/s ≥ 20 mm/s / 4 Maximum speed 150 mm/s 150 mm/s 35 mm/s / 5 Wafer uneveness adaptability * 100 µm 6 Average time of mapping *** Minimum value Typical value Maximum value < 500 ms <1s < 3 s **** 7 XY position locking ***** Minimum value Typical value Maximum value 0.02 µm 0.038 µm 1.5 µm 8 Z position locking ****** Minimum value Typical value Maximum value 0.65 µm 3.5 µm 15 µm No Shielding and Noise Capability * 1 Light attenuation ≥ 150 dB ** 2 EMI shielding ≥ 20 dB 0.5-20 GHz (typical) 3 Spectral noise floor ≤ -150 dBVrms/rtHz (≤ 1 MHz) 4 System AC noise ≤ 15 mVp-p (≤ 1 GHz) 5 
No Vibration Isolation Capability * 1 Natural frequency (vertical) 2.5~2.7 Hz 2 Natural frequency (horizontale) 2.0~4.5 Hz 3 Vertical damping (adjustable) 6%~20% 4 Horizontal damping 5%~6% 5 Air pressure 0.3~0.5 Mpa 6 Maximum load 1600 kg 7 Isolation efficiency 5%~6% 8 Response time to external excitation <1s 9 Vibration isolation level VC-C Microscope Bridge No Item X-axis Y-axis Z-axis 1 Travel 50 mm 50 mm 90 mm 2 Maximum positioning accuracy ±2 μm ±2 μm ±2 μm 3 Speed 60 mm/s 60 mm/s 120 mm/s Microscope * No Item Large FOV High Resolution 4 Typical magnification ** 225 X 500 ~ 2000X or higher 5 Typical optical lens resolution *** 3.0μm ≤ 1.5 µm 6 Product picture 
7 futureI image 
No. Item Chuck size 8-inch 12-inch 1 Temperature range Room temperature High and low temperature Room temperature High and low temperature 1 Maximum operating
temperature range *- -60 ~ 300°C - -60 ~ 300°C 3 Typical temperature range ** - -60 ~ 150°C
-60 ~ 200°C
-60 ~ 300°C
-40 ~ 150°C
-40 ~ 200°C
-40 ~ 300°C
0 ~ 100°C
0 ~ 200°C
Room temperature
~ 150°C
Room temperature
~ 200°C
Room temperature
~ 300°C- -60 ~ 150°C
-60 ~ 200°C
-60 ~ 300°C
-40 ~ 150°C
-40 ~ 200°C
-40 ~ 300°C
0 ~ 100°C
0 ~ 200°C
Room temperature
~ 150°C
Room temperature
~ 200°C
Room temperature
~ 300°C4 Temperature accuracy ± 1°C ± 1°C 5 Temperature resolution 0.1°C 0.1°C 6 Triax chuck leakage (non-thermal) ≤ 132 fA ≤ 132 fA 7 Triax chuck noise (non-thermal) ≤ 30 fA ≤ 42 fA 8 Cooling mode Liquid cool and air cool are optional 9 Typical transition time***
(Liquid cool)- 60°C → 25°C：23 min
25°C → 300°C：28 min
300°C → 25°C：25 min
25°C → - 60°C：37 min- 60°C → 25°C：23 min
25°C → 300°C：28 min
300°C → 25°C：25 min
25°C → - 60°C：37 min10 Typical transition time***
(Air cool)- 60°C → 25°C：9 min
25°C → 300°C：25 min
300°C → 25°C：12 min
25°C → -60°C：29 min- 60°C → 25°C：9 min
25°C → 300°C：25 min
300°C → 25°C：12 min
25°C → -60°C：29 min11 Maximum heating power 5.5 kW 12 Maximum cooling power 12.5 kW 13 Maximum refrigerant flow 5 m / s 14 Maximum transport pressure 4 bar 15 Maximum voltage (high power option) *** 10000 V 16 Maximum current (high power option) *** 800 A 17 • It shall be operated and stored strictly in accordance with the temperatureand humidityspecified in "Environmental conditions" in this Manual.
• Before the probe station leaves the factory, wafers shall be placed on chuck for performance verification and reliability test. Therefore, the scratches on the surface of chuck or the movable plate cannot be completely avoided.The scratches do not affect the use of the probe station and are not considered as a quality problem.
• Before the thermal probe station leaves the factory, heating and cooling test shall be conducted on the thermal system and thermal chuck.Therefore, the baking marks on the surface of the chuck (e.g. chuck color change and water vapor mark)cannot be completely avoided. The baking marks do not affect the use of the equipment and are not considered as a quality problem.18 Cleaning •Clean the probe station once a month. Use a soft dust-free cloth to remove the dirt from chuck. If lots of dust and debris are generated during use,cleaning frequency shall be increased.
•Do not use isopropyl alcohol(IPA) or any other chemicals on the chuck, as improper useof solvents or grinding agents may damage the probe station.19 Maintenance •No items can be placed on the chuck except the device under test.
•If the screws are loose, promptly tighten them carefully and evenly according to the torque requirements. If necessary, contact the Eoulu's service team for treatment.
•For the fully-automated probe station, ensure that the power supply has been properly shut down during maintenance or when not in use, and ensure they do not accidentally restart before maintenance is completed or before use.20 Service •For probe station with a high utilization rate, it is recommended to conduct operational inspection and service of the chuck once a year.
•The following services can only be executed by Eoulu's team:- Leveling and calibration of the chuck X/Y/Z/Theta stage
- Disassembly and installation of the chuck
21 Eoulu high performance thermal Chuck 
No. Item futureI function 1 Single-page operation Included 2 Autofocus Included 3 2 Points Align Included 4 Auto Align Included 5 AutoZ Included 6 High speed AutoZ Optional 7 Twin-rudder operation * Microscope and chuck movement 8 futureI interface * 
9 futureI and Eoulu integration
software futureC seamless
connection makes test easier *
10 futureI and Eoulu data software
futureD seamless connection makes
data processing easier *
No. Name Feature External View 1 AUX Chuck for SiPh Calibration •Advanced calibration technologies, real-time calibration
•Supports single fiber calibration
•Supports fiber array calibration
2 TopHat •Supports high and low temperature testing
•Temperature range：-40°C ~ 125°C
3 Fiber Holder •Supports edge coupling
•Supports vertical coupling
•Provides multi-angle vertical fiber holder: 8°~ 20°
4 Chip Holder •Customizable
•Strong compatibility to match different chip sizes
5 Detector •Wavelength Range: 800 nm ~ 1700 nm
•Peak Wavelength: 1550 nm
•Damage Threshold: 18 mW
•Storage Temperature: 0°C ~ 40°C
•Operating Temperature: 0°C ~ 40°C
No. Name Feature External View 1 AutoCal Calibration Software •Hexapod calibration
•Nanocube calibration
•Fiber calibration
•Distance calibration
•One-click automatic calibration to simplify operation and reduce training costs
•Accurate positioning, fast calibration, reduced testing cycle
•Supports calibration without Capsensor
•Typical automatic calibration time ≤ 5 min
No. Item A-005 Unit 1 Number of active axes 18 - Coarse positioning with spindle-driven axes 2 Active axes X, Y, Z, OX, OY, OZ - 3 Travel range in X, Y, Z ** ±6.5, ± 16, ± 8.5 mm 4 Travel range in OX, OY, OZ ** ± 14.5, ± 10, 10 ° 5 Minimum incremental motion in
X, Y, Z0.1 μm 6 Max. velocity in X, Y, Z 10 mm/s 7 Sensor type Rotary encoder - 8 Drive type Brushless DC motor - Fine positioning with piezo-driven axes 9 Active axes X, Y, Z - 10 Travel range in X, Y, Z, closed loop 100 μm 11 Min. incremental motion, open-loop 0.3 nm 12 Min. incremental motion, closed-Ioop 2.5 nm 13 Linearity error, for the entiretravel range *** 2 % 14 Repeatability (bidirectional)
10% travel range2 nm 15 Sensor type Incremental - 16 Drive type PICMA® - Alignment 17 Scanning time of spiraled area scan 500 µm Ø **** < 5 s 18 Scanning time of spiraled area scan 100 µm Ø **** < 1 s 19 Scanning time of spiraled area scan 10 µm Ø **** < 0.5 s 20 Signal optimization with gradient search, randomized with ±5 µm (repeatability < 0.01 dB) ***** < 0.3 s Miscellaneous 21 Operating temperature range, mechanics 0 ~ 50 °C 22 Operating temperature range, controller 5 ~ 40 °C 23 Cable length 2 m Requirements for the optical power meter 24 Output signal Analog output - 25 Output voltage range, max. - 5 ~ 5 V 26 Bandwidth, min 1 kHz 27 Noise level, max -60 dBm No. Item C-887.521 1 Input voltage range -5~5V 2 Resolution ADC 16 bit 3 Bandwidth 5 kHz 4 Input impedance 15 kohm 5 Connector BNC 6 Processor Intel Atom dual core (1.8 GHz) 7 Reference switch input TTL 8 Communication interfaces TCP/IP 9 Command set futureC command set 10 User software futureC 11 Output voltage 24 V 12 Peak output current 6000 mA 13 Operating voltage 24 V(ext. power adapter included) 14 Maximum current consumption 8A 15 Operating temperature range 5~40 C 16 Mass 2.8 kg No Item H-811K044 Unit Tolerance 1 Active axes X, Y, Z, OX, OY, OZ - - Motion and positioning 2 Travel range in X, Y, Z ** ± 17, ± 16, ± 6.5 mm - 3 Travel range in OX, OY, OZ ** ±10, ± 10, ±21 ° - 4 Single-actuator design resolution 10 nm - 5 Min. incremental motion X, Y 0.1 um typ. 6 Min. incremental motion Z 0.05 um typ. 7 Min. incremental motion OX, OY, eZ 1 urad typ. 8 Backlash X, Y 0.2 μm typ. 9 Backlash Z 0.06 um typ. 10 Backlash OX, OY 4 urad typ. 11 Backlash OZ 4 urad typ. 12 Repeatability X, Y ± 0.15 um typ. 13 Repeatability Z ± 0.06 μm typ. 14 Repeatability eX, OY ±2 urad typ. 15 OZ repeatable ±3 urad typ. 16 X,Y,ZMaximum axis speed 10 mm/s - 17 eX,OY, 0Z Maximum speed 250 mrad/s - 18 X,Y,ZTypical axis speeds 5 mm/s - 19 eX,eY,eZ Typical axis speeds 120 mrad/s - Mechanical properties 20 Stiffness X, Y 0.7 N/µm - 21 Stiffness Z 8 N/µm - 22 Load (base plate horizontal /
any orientation)
5/2.5 kg max 23 Holding force, de-energized (base plate horizontal / any orientation 15/2.5 N max 24 Motor type Brushless DC motor - - Miscellaneous 25 Operating temperature range 0 ~ 50 °C - 26 Material Stainless steel, aluminum - - 27 Mass 2.2 kg ± 5% 28 Cable length 2 m ± 10 mm No Item E-712K255 1 Axes 6 2 Processor PC-based, 600 MHz, real-time operating system 3 Sampling rate, servo control 20 kHz 4 Sampling rate, sensor 20 kHz 5 Controller type P-I, two notch filters 6 Sensor type Capacitive 7 Sensor channels 6 8 Sensor bandwidth (-3 dB) 10 kHz 9 Sensor resolution 18 (interpolated: 20) bits 10 External synchronization Yes 11 Output voltage -30 ~ 135 V 12 Amplifier channels 8 13 Peak output power / channel* 25 W 14 Average output power / channel 8 W 15 Current limitation Short-circuit proof 16 Resolution DAC 20 bit 17 Temperature sensor Yes 18 Communication interfaces TCP/IP 19 Piezo / sensor connector Sub-D Mix 25W3 20 Digital inputs/outputs MDR20: 8 × TTL 21 Command set futureC command set 22 User software futureC 23 Application programming interfaces C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW 24 Supported functions Wave generator, trigger I/O, macros 25 Linearization 4th-order polynomials, DDL option (Dynamic Digital Linearization) 26 Operating temperature range 5 ~ 40°C 27 Overheat protection Max. 75 °C, deactivation of the voltage output75 °C 28 Max. power consumption 225 W 29 Operating voltage 100 ~ 240 VAC, 50 ~ 60 Hz 30 Input voltage range ± 10 V 31 Resolution ADC 18 bit 32 Bandwidth 25 kHz 33 Input impedance 150 kohm 34 Connector LEMO EPG.00.302.NLN No Item P-616K001 Unit Tolerance Motion and Positioning 1 Active axes X, Y, Z - - 2 Open-loop travel, -20 to 120 V 120 / axis um + 20% /-0% 3 Closed-loop travel 100 / axis um + 20% / -0% 4 Min. incremental motion,
closed-loop2.5 nm typ. 5 Linearity error,
(for the entire travel range)2% - typ. 6 Bidirectional repeatability 2 nm typ. Sensor 7 Sensor type Optical incremental sensors - - Mechanical properties 8 Stiffness 0.5 N/um ± 10% 9 Unloaded resonant 700 Hz ± 10% frequency X, Y, Z 10 Resonant frequency
with 30 g load X, Y, Z380 Hz ± 20% 11 Push force capacity 15 N max. (any orientation) 12 Holding force; passive (any orientation) 15 N max. 13 Maximum permissible torque
for XYZ motion platform X, Y, Z0.4 Nm max. Drive Properties 14 Drive type PICMA® P-885.50 - - 15 Electrical capacitance 1.5 / axis µF ± 20% 16 Dynamic operating
current coefficient1.9 µA/(Hz x µm) ± 20% Miscellaneous 17 Operating temperature range -20 ~ 80 °C - 18 Material Aluminum, steel - - 19 Dimensions 40 × 40 × 40 mm - 20 Mass without cable 0.13 kg - 21 Mass with cable 0.32 kg - 22 Cable length 3 m ± 10 mm 23 Sensor / driver connection Sensor: HD D-Sub 26 (f)
Driver:: D-Sub 25W3 (m)- - No Item Semi-automated Fully-automated 1 Typical dimensions
(W x D x H）~1500 x 1115 x 1543.5 mm *~2063 x 1620 x 1954 mm **2 Maximum dimensions
(W x D x H）~1750 x 1465 x 1613.5 mm~2373 x 1620 x 2004 mm3 Main dimensions 
4 Main dimensions（Unit mm） Bilateral fiber optic alignment system 
5 External view 
6 Weight Probe station Thermal system
（Liquid Cooling）Thermal system
（Air Cooling）Loader ~ 850 kg ~ 180 kg ~ 180 kg ~ 345 kg 1 Environmental conditions Operating •Ambient temperature: 17°C ~ 25°C, ± 0.2°C
•Relative humidity: 20% ~ 60%Storage •Ambient temperature: 10°C ~ 30°C
•Relative humidity: ≤ 50%
•Storage time: ≤ 6 months (When the storage time exceeds 6 months,it needs to be powered on for 24 hours)Ambient vibration (including floor) •On the horizontal floor, equivalent uniform live load ≥ 200 kg/㎡
•Maximum level 100 micrometers/sec,rms (ISO Operating Theatre level) *
•Laboratory cleanliness: General laboratory (The requirements for the F1 operating and storage environment described in this Manual must be met) Recommended to be placed in Class-10,000 clean room and above **2 Power Semi-automated probe station •Probe station: single-phase 220 VAC ( +7%, -10%) ***,50/60 Hz, 1800 VA, GB 10A socket
•LCD, computer host, and vacuum pump: single-phase 220 VAC (+7%, -10%) ***,50/60 Hz, 1000 VA, GB 10A socket (3-way, power strip)Fully-automated probe station •Probe station: single-phase 220 VAC (+7%, -10%) ***, 50/60 Hz, 1800 VA, GB 10A socket
•LCD, computer host, and vacuum pump: single-phase 220 VAC (+7%, -10%) ***,50/60 Hz, 1000 VA, GB 10A socket (3-way, power strip)
•Loader: single-phase 220 VAC (+7%, -10%) ***, 50/60 Hz, 1000 VA, GB 10A socketThermal system •Controller: single-phase 220 VAC (+7%, -10%) ***, 50/60 Hz, GB 10A socket
•Chiller (Liquid cool): three-phase 380 VAC (+7%, -7%) ***, 50/60 Hz, GB 32A 5-core aviation socket
•Chiller (Air cool): three-phase 380 VAC (+7%, -7%) ***, 50/60 Hz, GB 32A 5-core aviation socket3 Clean Dry
Air ******
（CDA）Room-temperature probe station •Air pressure: 4.5 ~ 8 bar (65 ~ 116 psi)
•Dew point: ≤ -20°C
•Connector *****:Semi-automated: 8 mm OD (CDA 1) Fully-automated: 8 mm OD (CDA 1) and 8 mm OD (CDA 2)High and low-temperature probe station Testing at low and high temperatures, the following conditions must be met to keep Chuck frost-free:
•Air pressure: 4.5 ~ 8 bar (65 ~ 116 psi)
•Continuous flow:
Liquid cool: ≥ 100 l/min @ 4.5 bar
Air cool: ≥ 400 l/min @ 4.5 bar
•Dew point: ≤ -70°C (when the lowest test temperature is -60°C)
•Oil less than 0.01 mg/m³ ****
•Connector *****:
Semi-automated: 8 mm OD (CDA 1)
Fully-automated: 8 mm OD (CDA 1) and 8 mm OD (CDA 2)4 Vacuum ****** Air pressure (absolute vacuum) ≤ 0.4 bar @ 10 l/min Air pressure (relative vacuum) ≤ - 0.6 bar @ 10 l/min Continuous flow ≥ 10 l/min Connector ***** •Semi-automated: 8 mm OD (VAC 1)
•Fully-automated: 8 mm OD (VAC 1) and 8 mm OD (VAC 2)5 Accessories Air compressor Temperature range (liquid cool) Part Number Room temperature I-001 -60 ~ 150°C I-002 -60 ~ 200°C -60 ~ 300°C -40 ~ 150°C -40 ~ 200°C -40 ~ 300°C 0 ~ 100°C 0 ~ 200°C Room temperature ~ 150°C Room temperature ~ 200°C Room temperature ~ 300°C Vacuum pump - K-001 6 CDA and VAC Connectors 
Service category Service content Part Number Hardware service
(Installation)• System installation (mass production mode) SRV-301 • System installation (analysis mode) SRV-501 • Accessory installation SRV-305 • System reinstallation SRV-306 • Instrument connection SRV-307 • Ground connection SRV-308 Hardware service
(Calibration)• Accuracy calibration SRV-503 • Temperature calibration SRV-505 • Loader calibration SRV-506 Hardware service
(Training)• Probe station operation
(mass production mode)SRV-303 • Probe station operation (analysis mode) SRV-502 • RF calibration SRV-202 • Instrument operation SRV-203 Hardware service
(Others)• Probe station PM PM-F1 • Probe station relocation RELO-F1 • Accompanying service SRV-201 Software service
(Installation)• On-site installation SRV-101 • Remote installation SRV-103 Software service
(Update)• Platform function SRV-607 • Platform version SRV-606 • Test script SRV-608 • Instrument driver SRV-609 • Plug-in update SRV-701 Software service
(Training)• Software operation SRV-605 • Driver development SRV-603 • Script development SRV-702 Software service
(Others)• Operation consultation SRV-706 • Troubleshooting SRV-703 • Accompanying service SRV-705 Application service • IV test SRV-707 • CV test SRV-708 • RF test SRV-709 • SiPh test SRV-801 • Blue tape test SRV-802 • Fixture test SRV-803 • MMIC test SRV-805 • Automatic test SRV-806 Delivery service • Urgent service SRV-807 • Insurance SRV-808 • Unloading SRV-809 • Exclusive vehicle SRV-901 • Storing SRV-902 • Upstairs delivery SRV-903 • Cleanup SRV-905
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